Specific Process Knowledge/Thin film deposition/Sputter coater
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The Hummer Sputter coater
The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers).
One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM.
The Hummer sputter coater is located in servie area 3 in the clearoom.
The user manual and contact information can be found in LabManager:
Process knowledge
| Purpose |
| |
|---|---|---|
| Performance | Film thickness |
|
| Deposition rate |
| |
| Process parameter range | Process Temperature |
|
| Process pressure |
| |
| Substrates | Batch size |
|
| Allowed materials |
|
The Balzer Sputter coater
The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers).
One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM.
The Hummer sputter coater is located in servie area 3 in the clearoom.
The user manual and contact information can be found in LabManager:
Process knowledge
| Purpose |
| |
|---|---|---|
| Performance | Film thickness |
|
| Deposition rate |
| |
| Process parameter range | Process Temperature |
|
| Process pressure |
| |
| Substrates | Batch size |
|
| Allowed materials |
|