Specific Process Knowledge/Thin film deposition

From LabAdviser
3rd Level - Material/Methode

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Choose material to deposit

Dielectrica Semicondutors Metals Alloys Polymers

Silicon Nitride - and oxynitride
Silicon Oxide
Titanium Oxide

Silicon
Germanium

Aluminium
Titanium
Chromium
Nickel
Copper
Molybdenum
Palladium
Silver
Tin
Tantalum
Tungsten
Platinum
Gold

TiW alloy (10%/90% by weight)
NiCr alloy
AlTi alloy
NiV alloy

SU8
Antistiction coating
Topas
PMMA


Choose deposition equipment

PVD LPCVD PECVD Coaters Others

See the Lithography/Coaters page for coating polymers