Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using Plasma Asher
SiO2 can be etched in the Plasma Asher using CF4
Test work done January 2014 by BeritG. Hesrtrøm @Danchip
SiO2 can be etched in the Plasma Asher using CF4. This gives an isotropic etch.