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11:27, 15 September 2025 Pevo talk contribs uploaded File:2024-04-04 08-52-45 Wafer A1 DRY1050 107nm Rel.jpg
11:26, 15 September 2025 Pevo talk contribs created page File:2024-04-04 08-52-45 Wafer A1 DRY1050 107nm Abs.jpg
11:26, 15 September 2025 Pevo talk contribs uploaded File:2024-04-04 08-52-45 Wafer A1 DRY1050 107nm Abs.jpg
11:26, 15 September 2025 Pevo talk contribs created page File:2024-03-08 10-58-48 Wafer A1 DRY1050 110nm Rel.jpg
11:26, 15 September 2025 Pevo talk contribs uploaded File:2024-03-08 10-58-48 Wafer A1 DRY1050 110nm Rel.jpg
11:25, 15 September 2025 Pevo talk contribs created page File:2024-03-08 10-58-48 Wafer A1 DRY1050 110nm Abs.jpg
11:25, 15 September 2025 Pevo talk contribs uploaded File:2024-03-08 10-58-48 Wafer A1 DRY1050 110nm Abs.jpg
11:23, 15 September 2025 Pevo talk contribs created page File:2024-02-12 16-28-15 Wafer A1 DRY1050 109nm Rel.jpg
11:23, 15 September 2025 Pevo talk contribs uploaded File:2024-02-12 16-28-15 Wafer A1 DRY1050 109nm Rel.jpg
11:23, 15 September 2025 Pevo talk contribs created page File:2024-02-12 16-28-15 Wafer A1 DRY1050 109nm Abs.jpg
11:23, 15 September 2025 Pevo talk contribs uploaded File:2024-02-12 16-28-15 Wafer A1 DRY1050 109nm Abs.jpg
11:20, 15 September 2025 Pevo talk contribs created page File:2023-11-23 16-22-17 Wafer A1 DRY1100 478nm Rel.jpg
11:20, 15 September 2025 Pevo talk contribs uploaded File:2023-11-23 16-22-17 Wafer A1 DRY1100 478nm Rel.jpg
11:20, 15 September 2025 Pevo talk contribs created page File:2023-11-23 16-22-17 Wafer A1 DRY1100 478nm Abs.jpg
11:20, 15 September 2025 Pevo talk contribs uploaded File:2023-11-23 16-22-17 Wafer A1 DRY1100 478nm Abs.jpg
11:14, 15 September 2025 Pevo talk contribs created page File:2022-02-08 10-21-05 Wafer A1 108nm Rel.png
11:14, 15 September 2025 Pevo talk contribs uploaded File:2022-02-08 10-21-05 Wafer A1 108nm Rel.png
11:12, 15 September 2025 Pevo talk contribs created page File:2022-02-08 10-21-05 Wafer A1 108nm Abs.png (Break-down voltage. A1 furnace. Dry. Absolute)
11:12, 15 September 2025 Pevo talk contribs uploaded File:2022-02-08 10-21-05 Wafer A1 108nm Abs.png (Break-down voltage. A1 furnace. Dry. Absolute)
10:41, 15 September 2025 Pevo talk contribs created page File:2023-09-25 14-52-41 Wafer A1 DRY1050 106nm Rel.jpg (Break-down voltage. A1 furnace. Dry. Relative)
10:41, 15 September 2025 Pevo talk contribs uploaded File:2023-09-25 14-52-41 Wafer A1 DRY1050 106nm Rel.jpg (Break-down voltage. A1 furnace. Dry. Relative)
10:27, 12 September 2025 Pevo talk contribs created page File:3DStress - 20250827 W13 PRE DEPOSITION E3.pdf (Stress E3 nitride)
10:27, 12 September 2025 Pevo talk contribs uploaded File:3DStress - 20250827 W13 PRE DEPOSITION E3.pdf (Stress E3 nitride)
10:15, 12 September 2025 Pevo talk contribs created page File:3DStress - 20250827 W8 PRE DEPOSITION B2.pdf
10:15, 12 September 2025 Pevo talk contribs uploaded File:3DStress - 20250827 W8 PRE DEPOSITION B2.pdf
14:01, 27 May 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/C2 Furnace General Purpose Annealing (Created page with "'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C2_Furnace_III-V_oxidation click here]''' ''This page is written by DTU Nanolab internal'' ==General Purpose Annealing furnace (C2) == The General Purpose Annealing furnace (C2) is a Tempress horizontal furnace located in the furnace C stack. The furnace has from September 2024 become...")
14:54, 26 February 2024 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace/Pyrolysis with Resist Pyrlysis furnace (Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace click here]''' ''This page is written by DTU Nanolab internal'' ==Pyrolysis Recipes== Because the properties of the final carbon are largely depending on the pyrolysis process as well as the polymer precusors, each parameter has...")
14:49, 26 February 2024 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace/Acceptance test (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance_test click here]''' ''This page is written by DTU Nanolab internal'' ==Multipurpose Anneal furnace acceptance test== The acceptance for the Multipurpose Anneal furnace was performed in November 2014 by ATV Technologie and DTU Nanolab. At...")
14:24, 26 February 2024 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace (Created page with "==From February 2024: RESIST PYROLYSIS FURNACE== '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing#Multipurpose_annealing_furnace click here]''' ''This page is written by DTU Nanolab internal'' Thermal A2 Furnace A2 ==The...")
14:20, 26 February 2024 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Pyrolysis/Pyrolysis with Resist Pyrolysis Furnace (Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace click here]''' ''This page is written by DTU Nanolab internal'' ==Pyrolysis Recipes== Because the properties of the final carbon are largely depending on the pyrolysis process as well as the polymer precusors, each parameter has...")
13:06, 15 December 2023 Pevo talk contribs created page File:Oxidation test 2.jpg (C4 furnace - Oxidation test - 2)
13:06, 15 December 2023 Pevo talk contribs uploaded File:Oxidation test 2.jpg (C4 furnace - Oxidation test - 2)
13:05, 15 December 2023 Pevo talk contribs created page File:Oxidation test 1.jpg (C4 furnace - Oxidation test - 1)
13:05, 15 December 2023 Pevo talk contribs uploaded File:Oxidation test 1.jpg (C4 furnace - Oxidation test - 1)
16:05, 4 December 2023 Pevo talk contribs created page File:Thin nitride films below 30nm.pptx
16:05, 4 December 2023 Pevo talk contribs uploaded File:Thin nitride films below 30nm.pptx
12:44, 29 November 2023 Pevo talk contribs created page File:Stephan Presentation.pptx (Presentation of Mathias Adelmark's 3 week projekt: Deposition of thin nitride films)
12:44, 29 November 2023 Pevo talk contribs uploaded File:Stephan Presentation.pptx (Presentation of Mathias Adelmark's 3 week projekt: Deposition of thin nitride films)
12:02, 2 August 2023 Pevo talk contribs created page File:SEM Gemini 1.png (SEM Gemini 1)
12:02, 2 August 2023 Pevo talk contribs uploaded File:SEM Gemini 1.png (SEM Gemini 1)
11:54, 2 August 2023 Pevo talk contribs created page Specific Process Knowledge/Characterization/SEM Gemini 1 (Created page with " '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_1 click here]'''  ''This page is written by DTU Nanolab internal'' 400x400px|right|thumb|The SEM Supra 1 located in basement 346-907.{{photo1}} ")
14:04, 17 April 2023 Pevo talk contribs created page Specific Process Knowledge/Characterization/Particle Scanner Takano (Created page with "=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>550px=")
10:08, 30 January 2023 Pevo talk contribs created page File:Boron doped polySi.jpg
10:08, 30 January 2023 Pevo talk contribs uploaded File:Boron doped polySi.jpg
15:26, 26 January 2023 Pevo talk contribs created page Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon/Boron doped poly-Si (Created page with " ==Results from the acceptance test 2012== {| border="2" cellspacing="1" cellpadding="8" !Recipe name !Deposition rate [nm/min] !Refractive index@630nm !Thickness variation on center wafer !Thickness variation along the boat !Surface roughness [nm] !Sheet resistance [Ohms/square] !Boron concentation [boron atoms/cm<sup>3</sup>] !Comments |- |"DOPEPOLY" |~ 4.0-4.1 (4" wafers) | 1.29%-1.38% (4" wafers) | 1.63%-1.81% (4" wafers) | |~ 4.83, measured with AFM standard tip...")
09:30, 30 August 2022 Pevo talk contribs uploaded File:C1thickness-vs-slot.jpg
09:26, 30 August 2022 Pevo talk contribs uploaded File:C1thickness.jpg
14:08, 29 August 2022 Pevo talk contribs uploaded File:C1ThickVsSlot.pdf
15:11, 5 August 2022 Pevo talk contribs uploaded File:TEOS.jpg
13:29, 5 August 2022 Pevo talk contribs uploaded File:ASi-n-k.jpg