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19:13, 25 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Niobium Nitride (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Niobium_Nitride=submit click here]''' == Deposition of Niobium Nitride == Deposition of ScN can only be done by reactive sputtering using Sc target. The only tool for this application is the Cluster-based multi-chamber high vacuum sputtering...")
13:24, 23 July 2025 User account Choso talk contribs was created automatically
17:53, 17 July 2025 Eves talk contribs created page File:Eves SEM MoSi Mo20W RT 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs uploaded File:Eves SEM MoSi Mo20W RT 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs created page File:Eves SEM MoSi Mo20W 300C 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs uploaded File:Eves SEM MoSi Mo20W 300C 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs created page File:Eves SEM MoSi Mo20W 200C 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs uploaded File:Eves SEM MoSi Mo20W 200C 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs created page File:Eves SEM MoSi Mo26W RT 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs uploaded File:Eves SEM MoSi Mo26W RT 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs created page File:Eves SEM MoSi Mo26W 300C 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs uploaded File:Eves SEM MoSi Mo26W 300C 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs created page File:Eves SEM MoSi Mo26W 200C 3mTorr 20250717.png (File uploaded with MsUpload)
17:53, 17 July 2025 Eves talk contribs uploaded File:Eves SEM MoSi Mo26W 200C 3mTorr 20250717.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of MoSi/MoSi Co-sputtering in Cluster Lesker PC1 (Created page with "This page is written by Evgeniy Shkondin @DTU Nanolab if nothing else is stated. All images and photos on this page belongs to DTU Nanolab. The fabrication and characterization described below were conducted in 2025 by Evgeniy Shkondin and Matthias Keil. This page presents the results of co-sputter MoSi deposition using DC sputtering in Sputter-System Metal-Oxide(PC1), now commonly known as "Cluster Lesker"....")
22:46, 16 July 2025 Eves talk contribs created page File:Eves XRR 60nm makei XRR MoSi cosputter 26W 140W 3mTorr PC1 Src1Src3 RT 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR 60nm makei XRR MoSi cosputter 26W 140W 3mTorr PC1 Src1Src3 RT 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs created page File:Eves XRR 60nm makei XRR MoSi cosputter 26W 140W 3mTorr PC1 Src1Src3 300C 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR 60nm makei XRR MoSi cosputter 26W 140W 3mTorr PC1 Src1Src3 300C 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs created page File:Eves XRR 60nm makei XRR MoSi cosputter 26W 140W 3mTorr PC1 Src1Src3 200C 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR 60nm makei XRR MoSi cosputter 26W 140W 3mTorr PC1 Src1Src3 200C 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs created page File:Eves XRR 60nm makei XRR MoSi cosputter 20W 140W 3mTorr PC1 Src1Src3 RT 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR 60nm makei XRR MoSi cosputter 20W 140W 3mTorr PC1 Src1Src3 RT 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs created page File:Eves XRR 60nm makei XRR MoSi cosputter 20W 140W 3mTorr PC1 Src1Src3 300C 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR 60nm makei XRR MoSi cosputter 20W 140W 3mTorr PC1 Src1Src3 300C 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs created page File:Eves XRR 60nm makei XRR MoSi cosputter 20W 140W 3mTorr PC1 Src1Src3 200C 20250716.png (File uploaded with MsUpload)
22:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR 60nm makei XRR MoSi cosputter 20W 140W 3mTorr PC1 Src1Src3 200C 20250716.png (File uploaded with MsUpload)
22:41, 16 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of MoSi (Created page with "Molybdenum silicide is particularly attractive for optical coatings because co-sputtering Mo with Si allows precise control of MoSi stoichiometry—and, in turn, the film’s refractive index at the design wavelength. MoSi alloy can be deposited by DC co-sputtering in either Sputter-System Metal-Oxide (PC1) or Sputter-System Metal-Nitride (PC3)—collectively referred to as the Cluster Lesker. The process uses two 3-inch targets: *Mo (unbonded) *Si (indium-bonded) A...")
19:46, 16 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum/Mo Sputtering in Cluster Lesker PC1 (Created page with "This page is written by Evgeniy Shkondin @DTU Nanolab if nothing else is stated. All images and photos on this page belongs to DTU Nanolab. The fabrication and characterization described below were conducted in 2025 by Evgeniy Shkondin. This page presents the results of Mo deposition using DC sputtering in Sputter-System Metal-Oxide(PC1), now commonly known as "Cluster Lesker". The deposition target is Mo 3-inch. Source #3 (DC -...")
19:46, 16 July 2025 Eves talk contribs created page File:Eves XRR Mo 300W 3mTorr 100s PC1 Src3 Dc RT.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR Mo 300W 3mTorr 100s PC1 Src3 Dc RT.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs created page File:Eves XRR Mo 100W 3mTorr 300s PC1 Src3 Dc RT.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR Mo 100W 3mTorr 300s PC1 Src3 Dc RT.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs created page File:Eves Mo GiXRD may 2025.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs uploaded File:Eves Mo GiXRD may 2025.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs created page File:Eves Mo Deposition rate vs Power.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs uploaded File:Eves Mo Deposition rate vs Power.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs created page File:Eves XRR Mo 500W 3mTorr 50s PC1 Src3 Dc RT.png (File uploaded with MsUpload)
19:46, 16 July 2025 Eves talk contribs uploaded File:Eves XRR Mo 500W 3mTorr 50s PC1 Src3 Dc RT.png (File uploaded with MsUpload)
14:18, 14 July 2025 Bghe talk contribs created page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Silicon Nitride Etch (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/RIE_(Reactive_Ion_Etch) click here]''' =THIS PAGE IS UNDER CONSTRUCTION200px=")
10:45, 11 July 2025 User account Nimart talk contribs was created automatically
21:53, 7 July 2025 Reet talk contribs created page File:BlankSi 6in center-2-altlevel2.PNG (File uploaded with MsUpload)
21:53, 7 July 2025 Reet talk contribs uploaded File:BlankSi 6in center-2-altlevel2.PNG (File uploaded with MsUpload)
21:53, 7 July 2025 Reet talk contribs created page File:Si 6 in left 50umprsec aveof2.png (File uploaded with MsUpload)
21:53, 7 July 2025 Reet talk contribs uploaded File:Si 6 in left 50umprsec aveof2.png (File uploaded with MsUpload)
14:23, 7 July 2025 Reet talk contribs created page File:Dektak XT and P17 scan flatness comparison summer 2025.pptx (File uploaded with MsUpload)
14:23, 7 July 2025 Reet talk contribs uploaded File:Dektak XT and P17 scan flatness comparison summer 2025.pptx (File uploaded with MsUpload)
13:10, 7 July 2025 Reet talk contribs created page Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty (Created page with " =Stylus Profiler Measurement Accuracy= The accuracy of a height measurement with the profiler depends on the measurement settings, the sample, the instrument calibration and the resolution. ===Adjust Measurement Settings for your Sample=== Both the force setting and the scan speed are important: Too high force may compress a soft material like Al, Au or some polymers, while too low force may lead to the stylus "jumping" over features, especially if the scan speed is hi...")
16:49, 3 July 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2) (slated for deletion by PEVO)
23:04, 1 July 2025 Mmat talk contribs created page Category:346 (Created page with "This category includes all pages related to DTU Nanolab building 346/347.")