Main public logs
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- 15:31, 20 January 2025 Jehem talk contribs created page File:PA power v2.png
- 15:31, 20 January 2025 Jehem talk contribs uploaded File:PA power v2.png
- 15:30, 20 January 2025 Jehem talk contribs created page File:PA flowRateFullBoat v1.png
- 15:30, 20 January 2025 Jehem talk contribs uploaded File:PA flowRateFullBoat v1.png
- 15:27, 20 January 2025 Jehem talk contribs created page File:PA gas mix fullBoat v1.png
- 15:27, 20 January 2025 Jehem talk contribs uploaded File:PA gas mix fullBoat v1.png
- 16:45, 16 January 2025 Jehem talk contribs created page File:PA5 front.jpg
- 16:45, 16 January 2025 Jehem talk contribs uploaded File:PA5 front.jpg
- 13:56, 16 January 2025 Jehem talk contribs created page File:PA power v1.png
- 13:56, 16 January 2025 Jehem talk contribs uploaded File:PA power v1.png
- 13:56, 16 January 2025 Jehem talk contribs created page File:PA flowRate v3.png
- 13:56, 16 January 2025 Jehem talk contribs uploaded File:PA flowRate v3.png
- 17:05, 10 January 2025 Jehem talk contribs created page File:PA temperature v1.png
- 17:05, 10 January 2025 Jehem talk contribs uploaded File:PA temperature v1.png
- 17:05, 10 January 2025 Jehem talk contribs created page File:PA gas mix v2.png
- 17:05, 10 January 2025 Jehem talk contribs uploaded File:PA gas mix v2.png
- 17:05, 10 January 2025 Jehem talk contribs created page File:PA flowRate v2.png
- 17:05, 10 January 2025 Jehem talk contribs uploaded File:PA flowRate v2.png
- 17:04, 10 January 2025 Jehem talk contribs created page File:PA chamber pressure v2.png
- 17:04, 10 January 2025 Jehem talk contribs uploaded File:PA chamber pressure v2.png
- 09:49, 10 January 2025 Jehem talk contribs created page File:PA flowRate v1.png
- 09:49, 10 January 2025 Jehem talk contribs uploaded File:PA flowRate v1.png
- 09:43, 10 January 2025 Jehem talk contribs created page File:PA chamber pressure v1.png
- 09:43, 10 January 2025 Jehem talk contribs uploaded File:PA chamber pressure v1.png
- 09:40, 10 January 2025 Jehem talk contribs created page File:PA gas mix v1.png
- 09:40, 10 January 2025 Jehem talk contribs uploaded File:PA gas mix v1.png
- 17:12, 9 January 2025 Jehem talk contribs created page Specific Process Knowledge/Lithography/Strip/PlasmaAsher2 (Created page with "300x300px|thumb|Plasma asher for removing AZ resist on 6" wafers: positioned in E-5 The Plasma Asher 2 is the same as Plasma Asher 1 but has another loading system which is more convenient for batch loading of 6inch substrates. In this machine, only O2 and N2 gases are used for processes (in PlasmaAsher1, CF4 is used as well). The typical process parameters when operating the equipment: *Photeresist stripping Pressure: 0.8 - 1.0 mbar...")
- 17:11, 9 January 2025 Jehem talk contribs created page Specific Process Knowledge/Lithography/Strip/PlasmaAsher1 (Created page with "300x300px|thumb|The Plasma Asher 1 is placed in C-1 The Plasma Asher 1 (TePla 300 auto load model) can be used for the following process: *Photoresist stripping *Descumming *Surface cleaning after storage *Surface cleaning after processes using oil pump or diffusion pump vacuum *Surface cleaning as part of photolithography after wet developing of lacquer structures prior to wet or plasma etching *Stripping of photoresist layers after etching,...")
- 14:13, 11 December 2024 Jehem talk contribs created page Specific Process Knowledge/Lithography/Descum/PlasmaAsher2 (Created page with "''Jitka Urbánková & Jesper Hanberg, December 2019'' 640px|thumb|Descum results plasma asher 2 - recipe 1 <span style="color:red">This tool has been decomissioned 2024-12-02.</span> The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=200 LabManager] - '''requires login''' Descum of AZ Mir 701 resist on 100mm silicon wafer. F...")
- 14:09, 11 December 2024 Jehem talk contribs created page Specific Process Knowledge/Lithography/Descum/PlasmaAsher1 (Created page with "640px|thumb|right|Descum results plasma asher 1. September 2019 The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=55 LabManager] - '''requires login''' Descum of AZ5214E resist on 50mm silicon wafer. Wafer was placed horisontally in chamber on a 100 mm carier wafer. '''Recipe 1:'''<br> Note: Plasma asher was cold...")
- 11:10, 12 November 2024 Jehem talk contribs created page File:MA6-2 light intensity and uniformity from ignition.png
- 11:10, 12 November 2024 Jehem talk contribs uploaded File:MA6-2 light intensity and uniformity from ignition.png
- 13:46, 30 September 2024 Jehem talk contribs created page File:SpinDryer 5.jpg
- 13:46, 30 September 2024 Jehem talk contribs uploaded File:SpinDryer 5.jpg
- 13:45, 30 September 2024 Jehem talk contribs created page File:SpinDryer 4.jpg
- 13:45, 30 September 2024 Jehem talk contribs uploaded File:SpinDryer 4.jpg
- 13:45, 30 September 2024 Jehem talk contribs created page File:SpinDryer 3.jpg
- 13:45, 30 September 2024 Jehem talk contribs uploaded File:SpinDryer 3.jpg
- 13:40, 30 September 2024 Jehem talk contribs created page File:SpinDryer 2.jpg
- 13:40, 30 September 2024 Jehem talk contribs uploaded File:SpinDryer 2.jpg
- 13:39, 30 September 2024 Jehem talk contribs reverted File:Spin dryer 2ny.jpg to an old version (Reverted to version as of 16:22, 18 November 2014 (CET))
- 13:38, 30 September 2024 Jehem talk contribs uploaded a new version of File:Spin dryer 2ny.jpg
- 13:39, 16 January 2024 Jehem talk contribs created page File:ResistSensitivity UV.png
- 13:39, 16 January 2024 Jehem talk contribs uploaded File:ResistSensitivity UV.png
- 10:32, 31 August 2023 Jehem talk contribs created page Specific Process Knowledge/Back-end processing/Micro transfer printer (Created page with "Test")
- 14:36, 10 May 2023 Jehem talk contribs created page Template:Cc-nanolab (Created page with "This section, including all images and pictures, is created by DTU Nanolab staff unless otherwise stated.")
- 11:45, 19 April 2023 Jehem talk contribs uploaded a new version of File:Speed vs dose newWritehead.png
- 11:44, 19 April 2023 Jehem talk contribs uploaded a new version of File:Speed vs area newWritehead.png
- 09:36, 24 March 2023 Jehem talk contribs created page File:Speed vs area newWritehead.png
- 09:36, 24 March 2023 Jehem talk contribs uploaded File:Speed vs area newWritehead.png
