Main public logs
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- 11:16, 30 January 2024 Mfarin talk contribs uploaded File:25.01 CF4ICP 30w 8m-04.png (File uploaded with MsUpload)
- 11:16, 30 January 2024 Mfarin talk contribs created page File:25.01 CF4ICP 30w 8m-03.png (File uploaded with MsUpload)
- 11:16, 30 January 2024 Mfarin talk contribs uploaded File:25.01 CF4ICP 30w 8m-03.png (File uploaded with MsUpload)
- 11:15, 30 January 2024 Mfarin talk contribs created page File:25.01 CF4ICP 30w 8m-02.png (File uploaded with MsUpload)
- 11:15, 30 January 2024 Mfarin talk contribs uploaded File:25.01 CF4ICP 30w 8m-02.png (File uploaded with MsUpload)
- 16:39, 29 January 2024 Mfarin talk contribs created page File:25.01 CF4ICP 30w 8m-02.tif (File uploaded with MsUpload)
- 16:39, 29 January 2024 Mfarin talk contribs uploaded File:25.01 CF4ICP 30w 8m-02.tif (File uploaded with MsUpload)
- 13:46, 14 December 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/tests C4F8/H2 (Created page with "===Recipes and results - <span style="background:#FFD850">C<sub>4</sub>F<sub>8</sub> / H<sub>2</sub> tests</span> === {| border="1" cellspacing="1" cellpadding="1" align="left" ! '''Recipe''' ! '''Recipe parameters''' ! '''Process time''' ! '''Date''' ! '''SEM picture''' ! '''Etch rate in SiO2''' ! '''Etch rate in resist <br> (AZ5214E inverse)''' ! '''Selectivity <br> (SiO2:resist)''' |- |- |-style="background:white; color:black" |<!-- '''recipe name''' --> SiO2_ICP |<...")
- 13:37, 14 December 2023 Mfarin talk contribs created page File:NP CHF3 t1 22.5 10min 30WP-01.png (File uploaded with MsUpload)
- 13:37, 14 December 2023 Mfarin talk contribs uploaded File:NP CHF3 t1 22.5 10min 30WP-01.png (File uploaded with MsUpload)
- 13:37, 14 December 2023 Mfarin talk contribs created page File:NP CHF3 t1 22.5 10min 30WP-03.png (File uploaded with MsUpload)
- 13:37, 14 December 2023 Mfarin talk contribs uploaded File:NP CHF3 t1 22.5 10min 30WP-03.png (File uploaded with MsUpload)
- 13:37, 14 December 2023 Mfarin talk contribs created page File:NP CHF3 t1 22.5 10min 45WP-04.png (File uploaded with MsUpload)
- 13:37, 14 December 2023 Mfarin talk contribs uploaded File:NP CHF3 t1 22.5 10min 45WP-04.png (File uploaded with MsUpload)
- 13:37, 14 December 2023 Mfarin talk contribs created page File:NP CHF3 t1 22.5 10min 45WP-01.png (File uploaded with MsUpload)
- 13:37, 14 December 2023 Mfarin talk contribs uploaded File:NP CHF3 t1 22.5 10min 45WP-01.png (File uploaded with MsUpload)
- 13:21, 14 December 2023 Mfarin talk contribs created page File:CHF3 t1 0C 45W 01.png (File uploaded with MsUpload)
- 13:21, 14 December 2023 Mfarin talk contribs uploaded File:CHF3 t1 0C 45W 01.png (File uploaded with MsUpload)
- 13:17, 14 December 2023 Mfarin talk contribs created page File:CHF t2 nP 10min-05.png (File uploaded with MsUpload)
- 13:17, 14 December 2023 Mfarin talk contribs uploaded File:CHF t2 nP 10min-05.png (File uploaded with MsUpload)
- 13:17, 14 December 2023 Mfarin talk contribs created page File:CHF t2 nP 20min-02.png (File uploaded with MsUpload)
- 13:17, 14 December 2023 Mfarin talk contribs uploaded File:CHF t2 nP 20min-02.png (File uploaded with MsUpload)
- 11:40, 14 December 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/tests CHF3+H2 (Created page with "===Recipes and results - <span style="background:#FFD850">CHF<sub>3</sub> tests=== {| border="1" cellspacing="1" cellpadding="1" align="left" ! '''Recipe''' ! '''Recipe parameters''' ! '''Process time''' ! '''Date''' ! '''SEM picture''' ! '''SEM pic w/ no resist''' ! '''Redeposition - top view''' ! '''Profile angles''' ! '''Etch rate in SiO2''' ! '''Etch rate in resist <br> (AZ5214E inverse)''' ! '''Selectivity <br> (SiO2:resist)''' ! '''Etch rate in Si''' |- |- |-sty...")
- 14:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 800W-15W 4min E 04.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 800W-15W 4min E 04.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 800W-15W 4min C 04.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 800W-15W 4min C 04.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 800.15W 4min af PA 02.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 800.15W 4min af PA 02.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 4min af PA 02.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 4min af PA 02.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 4m pat C 07.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 4m pat C 07.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 4m pat C 04.png (File uploaded with MsUpload)
- 14:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 4m pat C 04.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 O2 10min af PA top 02.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 O2 10min af PA top 02.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 O2 10min 04.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 O2 10min 04.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 O2 10min 01.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 O2 10min 01.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 H2 10min af PA top 01.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 H2 10min af PA top 01.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 H2 10min 10.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 H2 10min 10.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 H2 10min 08.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 H2 10min 08.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs created page File:CHF3-22.5-H2-10min-0C-C-07.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF3-22.5-H2-10min-0C-C-07.png (File uploaded with MsUpload)
- 14:19, 3 October 2023 Mfarin talk contribs created page File:CHF3-22.5-H2-10min-0C-C-03.png (File uploaded with MsUpload)
