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- 12:54, 7 November 2023 Thope talk contribs created page File:OpticalPrealigner1.png (File uploaded with MsUpload)
- 12:54, 7 November 2023 Thope talk contribs uploaded File:OpticalPrealigner1.png (File uploaded with MsUpload)
- 09:41, 31 October 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing (Created page with "In E-beam lithography it is often necesarry to do a dose test in order to get the required result. In a dose test one will expose critical parts of a pattern with various doses and determine the best dose by SEM analysis of the final pattern. There are several ways to set up a dose test array on the JEOL system, in this section we will describe four different setups, each with their own benefits and drawbacks. =Simple SDF sequencing= The most straightforward method is t...")
- 09:11, 19 October 2023 Thope talk contribs created page File:NLOF 250nm 3.png (File uploaded with MsUpload)
- 09:11, 19 October 2023 Thope talk contribs uploaded File:NLOF 250nm 3.png (File uploaded with MsUpload)
- 09:11, 19 October 2023 Thope talk contribs created page File:NLOF 250nm 2.png (File uploaded with MsUpload)
- 09:11, 19 October 2023 Thope talk contribs uploaded File:NLOF 250nm 2.png (File uploaded with MsUpload)
- 09:11, 19 October 2023 Thope talk contribs created page File:NLOF 250nm 1.png (File uploaded with MsUpload)
- 09:11, 19 October 2023 Thope talk contribs uploaded File:NLOF 250nm 1.png (File uploaded with MsUpload)
- 09:11, 19 October 2023 Thope talk contribs created page File:NLOF 250nm 4.png (File uploaded with MsUpload)
- 09:11, 19 October 2023 Thope talk contribs uploaded File:NLOF 250nm 4.png (File uploaded with MsUpload)
- 09:02, 19 October 2023 Thope talk contribs created page File:NLOF 1500nm 2.png (File uploaded with MsUpload)
- 09:02, 19 October 2023 Thope talk contribs uploaded File:NLOF 1500nm 2.png (File uploaded with MsUpload)
- 09:02, 19 October 2023 Thope talk contribs created page File:NLOF 1500nm 1.png (File uploaded with MsUpload)
- 09:02, 19 October 2023 Thope talk contribs uploaded File:NLOF 1500nm 1.png (File uploaded with MsUpload)
- 14:29, 9 October 2023 Thope talk contribs created page File:MixMatch2.png (File uploaded with MsUpload)
- 14:29, 9 October 2023 Thope talk contribs uploaded File:MixMatch2.png (File uploaded with MsUpload)
- 14:26, 9 October 2023 Thope talk contribs uploaded a new version of File:MixMatch.png
- 14:13, 9 October 2023 Thope talk contribs created page File:IMAGE825 540.png (File uploaded with MsUpload)
- 14:13, 9 October 2023 Thope talk contribs uploaded File:IMAGE825 540.png (File uploaded with MsUpload)
- 14:13, 9 October 2023 Thope talk contribs created page File:IMAGE768 540.png (File uploaded with MsUpload)
- 14:13, 9 October 2023 Thope talk contribs uploaded File:IMAGE768 540.png (File uploaded with MsUpload)
- 14:13, 9 October 2023 Thope talk contribs created page File:IMAGE74 540.png (File uploaded with MsUpload)
- 14:13, 9 October 2023 Thope talk contribs uploaded File:IMAGE74 540.png (File uploaded with MsUpload)
- 14:13, 9 October 2023 Thope talk contribs created page File:IMAGE847 540.png (File uploaded with MsUpload)
- 14:13, 9 October 2023 Thope talk contribs uploaded File:IMAGE847 540.png (File uploaded with MsUpload)
- 12:44, 9 October 2023 Thope talk contribs created page File:250nmnLOF.png (File uploaded with MsUpload)
- 12:44, 9 October 2023 Thope talk contribs uploaded File:250nmnLOF.png (File uploaded with MsUpload)
- 11:01, 9 October 2023 Thope talk contribs uploaded a new version of File:MixMatch.png
- 10:42, 9 October 2023 Thope talk contribs uploaded a new version of File:MixMatch.png
- 10:35, 9 October 2023 Thope talk contribs created page File:MixMatch.png (File uploaded with MsUpload)
- 10:35, 9 October 2023 Thope talk contribs uploaded File:MixMatch.png (File uploaded with MsUpload)
- 10:09, 9 October 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/Mix-and-match (Created page with "Mix-and-match lithography is a process in which two lithography processes are combined to produce a pattern in a single resist layer. In this way one can combine the high resolution of E-beam lithography with the high speed of UV lithography.")
- 09:08, 22 September 2023 Thope talk contribs uploaded a new version of File:JEOL9500 request form.docx
- 15:13, 21 September 2023 Thope talk contribs uploaded a new version of File:JEOL9500 request form.docx
- 14:34, 20 September 2023 Thope talk contribs created page File:Mstsc Kp19mWq0Xn.png (File uploaded with MsUpload)
- 14:34, 20 September 2023 Thope talk contribs uploaded File:Mstsc Kp19mWq0Xn.png (File uploaded with MsUpload)
- 14:18, 20 September 2023 Thope talk contribs created page File:Mstsc buCwbbqsry.png (File uploaded with MsUpload)
- 14:18, 20 September 2023 Thope talk contribs uploaded File:Mstsc buCwbbqsry.png (File uploaded with MsUpload)
- 14:18, 20 September 2023 Thope talk contribs created page File:Mstsc 4mVrNHR5NT.png (File uploaded with MsUpload)
- 14:18, 20 September 2023 Thope talk contribs uploaded File:Mstsc 4mVrNHR5NT.png (File uploaded with MsUpload)
- 14:06, 20 September 2023 Thope talk contribs created page File:Mstsc wv04xJkkrS.png (File uploaded with MsUpload)
- 14:06, 20 September 2023 Thope talk contribs uploaded File:Mstsc wv04xJkkrS.png (File uploaded with MsUpload)
- 14:02, 20 September 2023 Thope talk contribs created page File:FFFTP jPrbi3QDDC.png (File uploaded with MsUpload)
- 14:02, 20 September 2023 Thope talk contribs uploaded File:FFFTP jPrbi3QDDC.png (File uploaded with MsUpload)
- 08:26, 20 September 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer (Created page with "From the external Beamer PC it is possible to remotely compile job files on the JEOL Compilation Computer, thus it is possible to verify that job files compiles as intended. Once a set of job files are found to compile as intended they can then be moved to the JEOL 9500 computer. The following describes how to move files to the JEOL Compilation Computer and how to remotely access it from the external Beamer PC. =Moving files with FFFTP= Files are moved with FFFTP. Open...")
- 10:32, 12 September 2023 Thope talk contribs uploaded a new version of File:JEOL9500 request form.docx
- 12:54, 8 September 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/EBLProcessExamples (Created page with "This page is under construction. In time we will fill it with relevant process examples and relevant data. =Single spot EBL= Arrays of circular holes can be created by normal area writing of a mask of circular structures. It can however also be done with a single spot approach, where the beam will dwell at each spot for several µs and hence each spot will become a circular structure by local over exposure. You can read more about this method in the linked article. '''...")
- 11:03, 8 September 2023 Thope talk contribs uploaded a new version of File:JEOL9500 request form.docx
- 10:54, 8 September 2023 Thope talk contribs created page File:JEOL9500 request form.docx (File uploaded with MsUpload)
