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13:53, 27 January 2023 Bghe talk contribs created page File:Contour Plot etch rates Si3N4.jpg (File uploaded with MsUpload)
13:53, 27 January 2023 Bghe talk contribs uploaded File:Contour Plot etch rates Si3N4.jpg (File uploaded with MsUpload)
13:53, 27 January 2023 Bghe talk contribs created page File:Contour Plot etch rates Si.jpg (File uploaded with MsUpload)
13:53, 27 January 2023 Bghe talk contribs uploaded File:Contour Plot etch rates Si.jpg (File uploaded with MsUpload)
16:17, 26 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/Resist/NILresist (Created page with "Here is a table with 2 different imprint resists we have recently used in the cleanroom, with links to a purchase manufactor, technical reports about resist properties and a current process flow, tested in our cleanroom. {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="95%" |- |- |-style="background:silver; color:black" |'''Resist''' |'''Manufacturer''' |'''Comments''' |'''Technical reports''' |'''Thinner''' |'''Spinner''' |'''Rinse''' |'''...")
16:12, 26 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/Resist/Ebeamresist (Created page with "== Standard E-beam resists and process guidelines == DTU Nanolab offers a limited number of standard EBL resist for our users. Our standard resist and process guidelines are summarized below. CSAR (AR-P 6200.09) is installed on Spin coater Gamma E-beam & UV for easy spin coating of 2", 4" and 6" substrates. Other substrate sizes or resist have to be used in the Labspin 2/3 coating systems. The standard resist bottles are stored in the chemical cupboard in E-4. {|borde...")
16:06, 26 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/Resist/DUVresist (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Resist/DUVresist click here]''' ==DUV resist== The spinning process will be performed by the customer together with the Photolith group of Nanolab. In case you would like to do DUV lithography please contact Lithography team, who will consult you and run your wafers together with you. In...")
15:43, 26 January 2023 Thope talk contribs uploaded a new version of File:EBLWorkflow.png (File uploaded with MsUpload)
15:28, 26 January 2023 Thope talk contribs created page File:EBLWorkflow.png (File uploaded with MsUpload)
15:28, 26 January 2023 Thope talk contribs uploaded File:EBLWorkflow.png (File uploaded with MsUpload)
15:26, 26 January 2023 Pevo talk contribs created page Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon/Boron doped poly-Si (Created page with " ==Results from the acceptance test 2012== {| border="2" cellspacing="1" cellpadding="8" !Recipe name !Deposition rate [nm/min] !Refractive index@630nm !Thickness variation on center wafer !Thickness variation along the boat !Surface roughness [nm] !Sheet resistance [Ohms/square] !Boron concentation [boron atoms/cm3] !Comments |- |"DOPEPOLY" |~ 4.0-4.1 (4" wafers) | 1.29%-1.38% (4" wafers) | 1.63%-1.81% (4" wafers) | |~ 4.83, measured with AFM standard tip...")
17:10, 25 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/Resist/UVresist (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Resist/UVresist click here]''' '''This section is under construction 70px''' = UV sensitive photoresist = = Exposure dose =")
17:07, 25 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/Resist (Created page with "'''Feedback to this page''': '''[mailto:photolith@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Resist click here]''' Resist Resist =Resist= '''This section is under construction 70px'''")
15:57, 25 January 2023 Indiogo talk contribs uploaded a new version of File:Set up.png
15:57, 25 January 2023 Indiogo talk contribs uploaded a new version of File:Set up.png
15:40, 25 January 2023 Indiogo talk contribs created page File:Set up.png
15:40, 25 January 2023 Indiogo talk contribs uploaded File:Set up.png
14:34, 25 January 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/EBLLandingpage (Created page with "E-Beam Lithography at DTU Nanolab")
15:13, 24 January 2023 Indiogo talk contribs created page Specific Process Knowledge/Thermal Process/RTP Annealsys (Created page with "=THIS PAGE IS UNDER CONSTRUCTION500px=")
15:11, 24 January 2023 Indiogo talk contribs created page Specific Process Knowledge/Thermal Process/RTP ANNEALSYS (Created page with "=THIS PAGE IS UNDER CONSTRUCTION550px=")
14:53, 24 January 2023 Thope talk contribs created page File:MGN3.png
14:53, 24 January 2023 Thope talk contribs uploaded File:MGN3.png
14:49, 24 January 2023 Thope talk contribs created page File:MGN2.png
14:49, 24 January 2023 Thope talk contribs uploaded File:MGN2.png
14:42, 24 January 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ/SDFJDFIntro (Created page with "= Job file preparation for JEOL 9500 = == Introduction == In order to write a pattern with the e-beam system you will have to generate a set of job files. These files are essentially a set of instructions which tell the system what pattern to write, where to place each pattern along with specific writing conditions, exposure dose, alignment conditions and calibration conditions. Apart from this you will naturally also have to generate the pattern you wish to expose....")
12:26, 24 January 2023 Jehem talk contribs created page File:Lift-off process new.png (Illustration of the lift-off process.)
12:26, 24 January 2023 Jehem talk contribs uploaded File:Lift-off process new.png (Illustration of the lift-off process.)
11:46, 24 January 2023 Jehem talk contribs created page File:Imprint schematic new.png (Schematic of the hot embossing process.)
11:46, 24 January 2023 Jehem talk contribs uploaded File:Imprint schematic new.png (Schematic of the hot embossing process.)
10:09, 24 January 2023 Jehem talk contribs created page File:AZ photoresists spectral sensitivity - remake v1.png (Spectral sensitivity of AZ resists represented as optical absorption.)
10:09, 24 January 2023 Jehem talk contribs uploaded File:AZ photoresists spectral sensitivity - remake v1.png (Spectral sensitivity of AZ resists represented as optical absorption.)
09:46, 24 January 2023 Jehem talk contribs uploaded a new version of File:AZ spectral sensitivity.gif
09:44, 24 January 2023 Jehem talk contribs uploaded a new version of File:AZ spectral sensitivity.gif
09:40, 24 January 2023 Jehem talk contribs uploaded a new version of File:Hmds new.jpg
17:16, 23 January 2023 User account Sinl talk contribs was created automatically
10:43, 23 January 2023 User account Eftsia talk contribs was created automatically
11:09, 20 January 2023 Mfarin talk contribs created page File:NH E-time.png (File uploaded with MsUpload)
11:09, 20 January 2023 Mfarin talk contribs uploaded File:NH E-time.png (File uploaded with MsUpload)
11:08, 20 January 2023 Mfarin talk contribs created page File:NH R-power.png (File uploaded with MsUpload)
11:08, 20 January 2023 Mfarin talk contribs uploaded File:NH R-power.png (File uploaded with MsUpload)
19:11, 19 January 2023 Bghe talk contribs created page File:Compare redeposition.pdf (File uploaded with MsUpload)
19:11, 19 January 2023 Bghe talk contribs uploaded File:Compare redeposition.pdf (File uploaded with MsUpload)
12:34, 19 January 2023 Mfarin talk contribs created page File:Cpr + iso x3 meas.png (File uploaded with MsUpload)
12:34, 19 January 2023 Mfarin talk contribs uploaded File:Cpr + iso x3 meas.png (File uploaded with MsUpload)
12:34, 19 January 2023 Mfarin talk contribs created page File:Cpr + iso x2 meas.png (File uploaded with MsUpload)
12:34, 19 January 2023 Mfarin talk contribs uploaded File:Cpr + iso x2 meas.png (File uploaded with MsUpload)
11:28, 19 January 2023 Mfarin talk contribs created page File:Holes 17 e 10 um.png (File uploaded with MsUpload)
11:28, 19 January 2023 Mfarin talk contribs uploaded File:Holes 17 e 10 um.png (File uploaded with MsUpload)
10:23, 19 January 2023 Mfarin talk contribs created page File:17.6 holes.png (File uploaded with MsUpload)
10:23, 19 January 2023 Mfarin talk contribs uploaded File:17.6 holes.png (File uploaded with MsUpload)