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• 11:58, 9 November 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Scandium/Sc Sputtering in Cluster Lesker PC3 (Created page with "This page presents the results of Scandium deposition using <b>RF</b> Sputtering in Sputter-System Metal-Nitride (PC3) commonly known as "Cluster Lesker". The deposition target is 4" <b>Sc</b> (0.25" Indium bonded to Cu plate). Source #1 was used. Materials from this source can either be deposited with RF or p-DC sputtering although only RF mode has been tested so far. The deposition and characterization described below were conducted in <b>2023 by Evgeniy Shkondin, D...")