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Slides presented at NNUM in Uppsala 2026

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**Lithographic result vs. exposure dose. Data by Thomas Anhøj @ DTU Nanolab, 2026.**


Width of 2µm line vs. exposure dose. Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).	Sidewall angle vs. exposure dose. Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).