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Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/C1 furnace break-down voltage measurement results

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Revision as of 12:46, 16 September 2025 by Pevo (talk | contribs) (Created page with "==Breakdown voltage results for the C1 Anneal-Oxide furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' <i>= Absolute break-down voltage/oxide thickness<i> |- |'''October 2023''' |DRY1100 |510 nm |350x350px|thumb|left...")
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Breakdown voltage results for the C1 Anneal-Oxide furnace

Dry oxidation

Date Oxidation recipe Oxide thickness Absolute break-down voltage Relative break-down voltage

= Absolute break-down voltage/oxide thickness

October 2023 DRY1100 510 nm
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