Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces
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What scanning mode, experiment/workspace and probe should I select
Roughness measurements | Topographic measurements with no steep/abrupt steps | Steep/abrupt steps but no high aspect ratio | High aspect ratio measurements | Large area fast scan | |
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Recommended mode | Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend ScanAsyst mode because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. However it also works fine in tapping mode. | For Topographic measurements with no steep/abrupt steps we also recommend ScanAsyst mode due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. We also recommend Tapping mode because we experience less problems when the tip end is slightly broken. | For Steep/abrupt steps but no high aspect ratio structures we still recommend Tapping mode or ScanAsyst mode" . | For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefore we recommend Tapping mode. | For large scan areas where you prioritize to scan fast then you can use contact mode. Here you can scan with scan rate of up to 2.43 Hz |
Recommended probes | Tap150Al-G or ScanAsyst in air | Tap150Al-G or ScanAsyst in air | Tap150Al-G or ScanAsyst in air for ScanAsyst mode
Tap150Al-G or TAP300Al-G for Tapping mode |
AR5T-NCHR or | SNL |
Recommended experiment/Workspace |
QNM in air* |
QNM in air* or TappingMode Tap150A |
QNM in air* or TappingMode Tap150A | TappingMode 300nm trench (for steps <~1µm)
Tappping mode in air - 6µm Deep Trench (for steps >1~µm) |
Standard Contact mode |
*By choosing the work space/experiment QNM in air (Mechanical properties - QNM in air) scanAsyst is included and so are the nanomechanical properties like modulus, adhesion, dissipation and deformation.
More information about de different modes
Contact, Tapping and Peak Force Tapping
Please flowing this link to down load the file from LabManager (for DTU Nanloab users):
Introduction to Bruker ScanAsyst and PeakForce tapping AFM technology
PeakForce tapping and quantitative nanomechanical mapping
Please flowing this link to Brukers homepage:
- PeakForce tapping and Nanomechanical option - NOT WORKING ANYMORE
- Quantitative_Mechanical Property mapping at the Nanoscale with PeakForceQNM - NOT WORKING ANYMORE
Peak Force KPFM (Kelvin Probe Force Microscopy)
- Application note on KPFM: File:PeakForce-Kelvin-Probe-Force-Microscopy-App-Note-BRUKER.pdf