Feedback to this page: click here

Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

Course	Mandatory...	Short Course Decription	Links to course home page
Introduction course	for working inside the cleanroom	See the homepage	Introduction course information on the Nanolab homepage
TPT Lithography	for working with lithography	The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.	TPT Lithography
Mask Design	no	The course is recommended all users who intend to design their own masks for lithography.	Mask Design
TPT SEM	for getting access to SEMs at Nanolab building 346 and 314/307	The course includes theory on SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab (building 346/314/307).	TPT SEM
TPT Dry Etch	for getting access to dry etch equipment	The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.	TPT Dry Etch
TPT Thin Film	for getting access to thin film deposition/growth equipment	This is a theoretical course introducing the deposition and growth techniques available at DTU Nanolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.	TPT Thin Film
Ph.d. course	for ph.d. students at Nanolab	This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.	10868 Methods in micro and nano fabrication