Specific Process Knowledge/Thin film deposition/thermalevaporator
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Thermal evaporator- A system for deposition of metals
The user manual, APV, technical information and contact information can be found in LabManager:
Thermal Evaporator in LabManager
Process information
Materials for thermal evaporator evaporation
Purpose | Deposition of metals and silicon |
|
---|---|---|
Performance | Film thickness |
|
Deposition rate |
| |
Process parameter range | Process Temperature |
|
Process pressure |
| |
Substrates | Batch size |
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Substrate material allowed |
| |
Material allowed on the substrate |
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* For thicknesses above 200 nm permission is requested.