Specific Process Knowledge/Etch/Etching of Aluminium
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Revision as of 09:16, 22 August 2016 by Bghe (talk | contribs) (→Comparison of Aluminium Etch Methods)
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Etching of Aluminium
Etching of aluminium can be done either by wet etch, dry etch or by sputtering with ions.
Comparison of Aluminium Etch Methods
Al wet etch 1 | Al wet etch 2 | Developer TMAH manual | ICP metal | IBE (Ionfab300+) | |
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Generel description | Wet etch of pure Al | Wet etch of Al + 1.5% Si |
Wet etch/removal: TMAH |
Dry plasma etch of Al | Sputtering of Al - pure physical etch |
Etch rate range |
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Etch profile |
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Substrate size |
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Smaller pieces glued to carrier wafer
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Allowed materials |
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