Specific Process Knowledge/Thin film deposition/Sputter coater

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The Hummer Sputter coater

The Hummer sputter coater in service area 3

The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers).

One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM.

The Hummer sputter coater is located in servie area 3 in the clearoom.

The user manual and contact information can be found in LabManager:

Hummer sputter coater

Process knowledge

Overview of the performance of the Hummer sputter coater and some process related parameters

Purpose
  • Gold sputter coating of different samples mainly before SEM characterization (see purpose)
Performance Film thickness
  • 10 Å - ?
Deposition rate
  • Not measured
Process parameter range Process Temperature
  • Room temperature
Process pressure
  • 150 mTorr
Substrates Batch size
  • One 100 mm wafer
  • Several smaller samples
Allowed materials
  • All materials allowed in the cleanroom


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The Balzer Sputter coater

The Hummer sputter coater in service area 3

The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers).

One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM.

The Hummer sputter coater is located in servie area 3 in the clearoom.

The user manual and contact information can be found in LabManager:

Hummer sputter coater

Process knowledge

Overview of the performance of the Hummer sputter coater and some process related parameters

Purpose
  • Gold sputter coating of different samples mainly before SEM characterization (see purpose)
Performance Film thickness
  • 10 Å - ?
Deposition rate
  • Not measured
Process parameter range Process Temperature
  • Room temperature
Process pressure
  • 150 mTorr
Substrates Batch size
  • One 100 mm wafer
  • Several smaller samples
Allowed materials
  • All materials allowed in the cleanroom