Specific Process Knowledge/Characterization/Profiler

{{cc-nanolab}

Feedback to this page: click here

DektakXTA info copied to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_XTA#Performance_and_Process_Parameters

P17 info copied to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Tencor_P17#Tencor_P17_Stylus_Profiler

info moved to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Sensofar_S_Neox

Optical Profiler (Filmetrics)

Unless otherwise stated, all content in this section was done by Berit Herstrøm, DTU Nanolab

The Profilm3D optical profiler from Filmetrics uses white-light-interferometry (WLI) and phase-shifting-interferometry (PSI) to produce surface profiles and depth-of-field color images.

The main purpose is 3D topographic imaging of surfaces, step height measurements and roughness measurements with larger FOV (Field Of View) than the AFM, but less horisontal resolution.

For most samples the optical profiler provides fast and easy information without any sample preparation. However, it can be necessary to cover thin transparent layers (< 2 µm) with a thin layer of metal.

The resolution is limited by the objective and the sampling resolution.

The user manual, technical information and contact information can be found in LabManager (requires login):

Optical profiler (Filmetrics) info page in LabManager

Equipment performance and process related parameters

Equipment		Optical profiler
Purpose	3D topographic imaging of surfaces.	3D imaging of surfaces Roughness measurements Step height measurements 3D topographic measurements
Posibilities	Interferometric profiling	Standard microscope imaging PSI (Phase Shift Interferometry) WLI (White light Interferometry) Stitched scans Wafer mapping
Performance	With the current 10x objective	See here the data sheet for this instrument (requires login)]
Substrates	Substrate size	Substrates no bigger than 100 mm x 100mm
	Substrate materials allowed	In principle all materials

Dektak 3ST

The Dektak 3ST is intended for profile measurements on samples outside the cleanroom. It is located in the basement, building 346, room 904.

The user manual, technical information and contact information can be found in LabManager:

Dektak 3ST (Dektak) in LabManager

The computer connected to the Dektak 3ST is pretty old and runs Windows 98 SE. It is not connected to the network but traces can be saved on either USB memory stick or floppy disk. The USB driver is an old universal driver and has been shown to work with small size USB sticks. However it did not work with an 8GB Kingston stick.

Equipment performance and process related parameters

Performance	Vertical Range	65 kÅ, 655 kÅ, 1310 kÅ
	Scan length range	50-50000 µm
	Stylus track force	Recommended: 3-10 mg, depending on the softness of the surface
	Scan speed ranges	High speed: 3s for 50µm to 50000µm Medium speed: 12s for 50µm to 10000µm Low speed: 50s
Materials	Allowed substrate materials	III-V Silicon polymer

Stylus Profiler: Dektak150

The stylus profiler Dektak150 is intended for profile measurements on samples outside the cleanroom. The Dektak150 is especially well suited for measuring soft samples as it can be adjusted to apply lower force than the other stylus profilers at Nanolab.

The user manual, technical information and contact information can be found in LabManager:

Stylus profiler:Dektak150 in LabManager

The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network.

Info about measurement accuracy can be found here.

Equipment performance and process related parameters

Purpose	Profiler for measuring micro structures\|	Single line profiles Surface roughness on a line scan
Location	Building 347, room 080	North-East corner of the building, in the basement When you enter the building from the East, you enter directly into the basement.
Performance	Scan range x y	Line scan x: 50 µm to 55 mm in a single scan
	Scan range z	50 Å to 1 mm
	Resolution x y	Theoretically down to 0.003 µm (in practice the resolution is limited by the tip size)
	Resolution z	1Å (@65kÅ), 10Å (@655 kÅ), 80 Å (@5240 kÅ), 160 Å (@1mm)
	Maximum sample thickness	100 mm
Hardware settings	Tip radius	5 µm 45^o cone 0.2 µm 45^o cone on request
Substrates	Substrate size	Up to 6"
	Substrate materials allowed	In principle all materials