Specific Process Knowledge/Characterization/Profiler
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Optical Profiler (Sensofar S Neox)
Unless otherwise stated, all content in this section was done by Berit Herstrøm, DTU Nanolab
The Sensofar S Neox 3D Optical Profiler has a sensor head that combines confocal, interferometry and focus variation techniques as well as thick and thin film measurement capabilities.
The Neox sensor head provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), CSI (Coherence Scanning Interferometry), Active illumination (Ai) Focus Variation and high resolution thin film thickness measurements on a single instrument.
The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus methods (i.e. with aspect ratios higher that 1:1), roughness measurements with larger FOV (Field Of View) than the AFM, but less horisontal resolution.
For most samples the optical profiler provides fast and easy information without any sample preparation. However, it can be necessary to cover thin transparent layers (< 2 µm) with a thin layer of metal.
The resolution is limited by the objectives and the pixel resolution.
Analysis software:
- Free analysis software for visualizing and analyzing AFM and Optical profiler files (Sensofar) Gwyddion
- SensoView software from Sensfar want also be downloaded for all users: U:\Nlab\CleanroomDrive\_Equipment\Optical profiler Sensofar\SensoVIEW 1.6.0
- We have an extra license to the more advanced SensoMap software. As a user of the system you can access this by remote desktop here: DTU-8CC0321MFL. You log in using your DTU login.
The user manual, technical information (SensoSCAN and SensoVIEW manuals) and contact information can be found in LabManager (requires login):
Optical profiler (Sensofar S Neox) info page in LabManager
Process Information
- Sensofar presentation on how the sensofar works (for the previous system but the techniques are the same) -requires login
- Neox leaflet including specifications - requires login
- Acceptance measurements on the S Neox Sensofar: Media:Acceptance measurements on Nanolab samples.pdf, measured at the acceptances test by Sensofar and Berit Herstrøm@ DTU Nanolab
- Results from the Optical Profiler (Sensofar) acceptance test - for the previous system - expired!!
| Equipment | Optical profiler | |
|---|---|---|
| Purpose | 3D topographic imaging of surfaces. |
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| Posibilities | Confocal, interferometric and AI focus variation tophography and reflectometry
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| Performance | Depending on the objective chosen |
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| Substrates | Substrate size |
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| Substrate materials allowed |
| |
Optical Profiler (Filmetrics)
Unless otherwise stated, all content in this section was done by Berit Herstrøm, DTU Nanolab
The Profilm3D optical profiler from Filmetrics uses white-light-interferometry (WLI) and phase-shifting-interferometry (PSI) to produce surface profiles and depth-of-field color images.
The main purpose is 3D topographic imaging of surfaces, step height measurements and roughness measurements with larger FOV (Field Of View) than the AFM, but less horisontal resolution.
For most samples the optical profiler provides fast and easy information without any sample preparation. However, it can be necessary to cover thin transparent layers (< 2 µm) with a thin layer of metal.
The resolution is limited by the objective and the sampling resolution.
The user manual, technical information and contact information can be found in LabManager (requires login):
Optical profiler (Filmetrics) info page in LabManager
| Equipment | Optical profiler | |
|---|---|---|
| Purpose | 3D topographic imaging of surfaces. |
|
| Posibilities | Interferometric profiling |
|
| Performance | With the current 10x objective |
See here the data sheet for this instrument (requires login)] |
| Substrates | Substrate size |
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| Substrate materials allowed |
| |
Dektak 3ST
The Dektak 3ST is intended for profile measurements on samples outside the cleanroom. It is located in the basement, building 346, room 904.
The user manual, technical information and contact information can be found in LabManager:
Dektak 3ST (Dektak) in LabManager
The computer connected to the Dektak 3ST is pretty old and runs Windows 98 SE. It is not connected to the network but traces can be saved on either USB memory stick or floppy disk. The USB driver is an old universal driver and has been shown to work with small size USB sticks. However it did not work with an 8GB Kingston stick.
| Performance | Vertical Range |
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|---|---|---|
| Scan length range |
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| Stylus track force |
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| Scan speed ranges |
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| Materials | Allowed substrate materials |
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Stylus Profiler: Dektak150
The stylus profiler Dektak150 is intended for profile measurements on samples outside the cleanroom. The Dektak150 is especially well suited for measuring soft samples as it can be adjusted to apply lower force than the other stylus profilers at Nanolab.
The user manual, technical information and contact information can be found in LabManager:
Stylus profiler:Dektak150 in LabManager
The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network.
Info about measurement accuracy can be found here.
| Purpose | Profiler for measuring micro structures| |
|
|---|---|---|
| Location | Building 347, room 080 |
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| Performance | Scan range x y |
Line scan x: 50 µm to 55 mm in a single scan |
| Scan range z |
50 Å to 1 mm | |
| Resolution x y |
Theoretically down to 0.003 µm (in practice the resolution is limited by the tip size) | |
| Resolution z |
1Å (@65kÅ), 10Å (@655 kÅ), 80 Å (@5240 kÅ), 160 Å (@1mm) | |
| Maximum sample thickness |
100 mm | |
| Hardware settings | Tip radius |
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| Substrates | Substrate size |
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| Substrate materials allowed |
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