Specific Process Knowledge/Back-end processing/Micro transfer printer
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Equipment info in LabManager - requires login
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Purpose |
UV exposure | ||
---|---|---|---|
Performance | Exposure mode |
| |
Exposure light/filters |
| ||
Minimum structure size | |||
Mask size |
5x5inch optinal | ||
Alignment modes |
No alignment possible | ||
Substrates | Substrate size |
Up to 8inch substrates, different shapes | |
Allowed materials |
All cleanroom materials | ||
Batch |
1 |