LabAdviser/Courses/TPT SEM

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This page is written by DTU Nanolab staff.

The SEM TPT

DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). The course includes theory on SEM, as well as training in instrument operation.

The course is for all users who intend to perform any kind of SEM related processes, and for all new SEM users it is mandatory to attend the course unless you will only use the Hitachi TM3030 tabletop SEM in building 451.

The first part of the course is a lecture. After the lecture, practical SEM trainings will be arranged.

The SEMs at DTU Nanolab are located in building 314, 346, 375, and 451. The main SEM and TEM building is 314, which is open for all users from academia and industry. The SEMs are used for different applications, and how the practical trainings are conducted differs for the different buildings and in some cases also for the different SEMs. Please be aware that only users who work with fabrication at Nanolab (in the cleanroom or in the other labs in buildings 346 and 451) can get training at the SEMs in these buildings.

Scanning Electron Microscopy (SEM) Tool Package Training (TPT) course
Schedule	All participants	Theoretical part: A 3-hour lecture. The first part of the lecture provides an introduction to SEM theory including electron optics and image formation. The second part of the lecture concerns practical details about the SEMs at DTU Nanolab including the detectors, sample preparation, and tips and tricks. The lecture is held approximately once a month. The next one will be on October 2nd, 2023 from 9-12.30 at DTU Nanolab in building 451, room 919. Signups will open up in DTU Learn - stay tuned. It is also possible to see some videos of the lecture in DTU Learn instead of attending the lecture in person, just contact the responsible persons.
	SEM users in building 314 and 375	Practical part: Depending on the type of sample and type of characterization, i.e. what SEM techniques, detectors or SEM sample preparation technique that should be used, users will get one or more individual trainings to the SEM they are going to use, before they can be authorized to operate the SEM alone.
	SEM users in building 346	Practical part: Users first attend a 2-hour SEM training session in groups of 2-3 people. For this training SEM Supra 1 will be used to study standard training samples. After the group session, users have one or more individual trainings before they are authorized to operate the SEM alone. Users should bring their own sample for the individual training(s). Notice that if you need to bring a sample out of the cleanroom for individual training on SEM Supra 1, you will have to clean it to bring it back into the cleanroom. After at least four hours of independent SEM Supra 1 usage (after the training sessions), users can request additional trainings for the SEM Supra 2 and 3 in the cleanroom. In some cases the user may transition straight to individual training on Supra 2 and 3 after the group training. Ask staff if this may apply to you.
Sign up for the course	SEM users in building 314 and 375	Fill out a SEM access request form: https://www.nanolab.dtu.dk/use-nanolab/use-of-our-facilities Meet and discuss with SEM course responsible about a suitable SEM sample preparation and SEM technique. Sign up to TPT SEM lecture in DTU Learn - stay tuned - next lecture is on October 2nd, 2023, from 9-12.30 in building 451, room 919. The next one following that will be in early November - let us know if you'd like to request a particular date. It is also possible to see some videos of the lecture in DTU Learn instead of attending the lecture in person, just contact the responsible persons. After the SEM lecture, reach out to the SEM responsible person from building 314/375 to arrange for SEM hands on sessions at building 314/375. The SEM responsible will contact you within 7 days to arrange two SEM hands on sessions.
Sign up for the course	SEM users in building 346	Join the lecture on October 2nd, 2023, from 9-12.30 in building 451, room 919. The next one following that will be in early November - let us know if you'd like to request a particular date. Signups will open up in DTU Learn - stay tuned. It is also possible to see some videos of the lecture in DTU Learn instead of attending the lecture in person, just contact the responsible persons.
Location	All participants	Theoretical part: The location of the lecture is announced in DTU Learn (link coming soon) and/or by email a couple of days before the lecture.
	SEM users in building 314 and 375	Practical part: Building 314 or 375, depending in which building you are going to SEM and what SEM(s) you have to use
	SEM users in building 346	Practical part: The SEM Supra 1 is used as a training instrument. This SEM is located in building 346 room 904 (basement). The meeting point will be at the stairs to the basement in building the 346 or by the SEM.
Prerequisites	All participants	None
Preparations	All participants	Before the lecture: All participants should know in which building they are going to use SEM. If you are in doubt, please fill out this SEM access request form: https://www.nanolab.dtu.dk/use-nanolab/use-of-our-facilities Read the "Scanning Electron Microscopy Primer" by Bob Hafner and some notes that lists the differences between the SEMs described in the primer and the SEMs at DTU Nanolab (mainly the SEMs in building 346). You can find the preparation material here: U:\Nlab\CleanroomDrive\SEM TPT, or online: SEM Primer (included with permission from the author) All participants will also get an email with the preparation material a couple of days before the lecture assuming you sign up early enough.
	SEM users in building 314 and 375	The responsible persons will tell you what you have to prepare. This depends on what SEM(s) you will have to use.
	SEM users in building 346	Before the first group training session: Watch som training videos. You can find them on YouTube: https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj Before the individual training session(s): Read the user manual for SEM Supra 1. This can be found in LabManager here
Course responsible	All participants	General questions about the SEM TPT course can be sent to SEM@nanolab.dtu.dk
	SEM users in building 314 and 375	Berit Wenzell (bewe@dtu.dk) Marie Karen Tracy Hong Lin (mktracy@dtu.dk) - Softmatter and life science samples
	SEM users in building 346	The SEM responsible in building 346. Contact email: SEM@nanolab.dtu.dk
Learning objectives	All participants	Explain SEM electron optics and detectors Understand possibilities and limitations Optimize SEM images Know where to go after the lecture – which tool and where
Lecture slides	All participants	The slides from the presentation can be found on LabManager as three separate files (requires login): Slides 1-31 with introduction and theory Slides 32-49 about image optimization (continued), EDX, and some info on practical SEM operation Slides 50-106 about practical SEM operation, tips and troubleshooting.