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The SEM TPT
DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). The course includes theory on SEM, as well as training in instrument operation.
The course is for all users who intend to perform any kind of SEM related processes, and for all new SEM users it is mandatory to attend the course unless you will only use the Hitachi TM3030 tabletop SEM in building 451.
The first part of the course is a lecture. After the lecture, practical SEM trainings will be arranged.
The SEMs at DTU Nanolab are located in building 314, 346, 375, and 451. The main SEM and TEM building is 314, which is open for all users from academia and industry. The SEMs are used for different applications, and how the practical trainings are conducted differs for the different buildings and in some cases also for the different SEMs. Please be aware that only users who work with fabrication at Nanolab (in the cleanroom or in the other labs in buildings 346 and 451) can get training at the SEMs in these buildings.
| Scanning Electron Microscopy (SEM) Tool Package Training (TPT) course
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| Schedule
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All participants
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Theoretical part:
- A 3-hour lecture. The first part of the lecture provides an introduction to SEM theory including electron optics and image formation. The second part of the lecture concerns practical details about the SEMs at DTU Nanolab including the detectors, sample preparation, and tips and tricks.
- The lecture is held approximately once a month. The date(s), time and location for the next lecture(s) can be seen in this Doodle:
https://doodle.com/meeting/participate/id/b8E3ZDWd
It is also possible to see some videos of the lecture in DTU Learn if you contact the responsible persons.
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SEM users in building 314 and 375
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Practical part:
- Depending on the type of sample and type of characterization, i.e. what SEM techniques, detectors or SEM sample preparation technique that should be used, users will get one or more individual trainings to the SEM they are going to use, before they can be authorized to operate the SEM alone.
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SEM users in building 346
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Practical part:
- Users first attend a 2-hour SEM training session in groups of 2-3 people. For this training SEM Supra 1 will be used to study standard training samples.
- After the group session, users have one or more individual trainings before they are authorized to operate the SEM alone. Users should bring their own sample for the individual training(s).
- Notice that if you need to bring a sample out of the cleanroom for individual training on SEM Supra 1, you will have to clean it to bring it back into the cleanroom.
- After at least four hours of independent SEM Supra 1 usage (after the training sessions), users can request additional trainings for the SEM Supra 2 and 3 in the cleanroom.
- As Supra 1 can get busy, in some cases the user may transition straight to individual training on Supra 2 and 3 after the group training. Ask staff if this may apply to you.
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| Sign up for the course
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SEM users in building 314 and 375
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- Fill out a SEM access request form:
https://www.nanolab.dtu.dk/use-nanolab/use-of-our-facilities
- Meet and discuss with SEM course responsible about a suitable SEM sample preparation and SEM technique.
- Sign up to TPT SEM lecture by adding your name and e-mail address to this Doodle:
https://nanolab.doodle.com/poll/udmcihbbgudyynfy
- After the SEM lecture, reach out to the SEM responsible person from building 314/375 to arrange for SEM hands on sessions at building 314/375. The SEM responsible will contact you within 7 days to arrange two SEM hands on sessions.
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SEM users in building 346
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| Location
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All participants
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Theoretical part:
- The location of the lecture will be notified in the Doodle, and/or by email a couple of days before the lecture
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SEM users in building 314 and 375
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Practical part:
- Building 314 or 375, depending in which building you are going to SEM and what SEM(s) you have to use
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SEM users in building 346
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Practical part:
- The SEM Supra 1 is used as a training instrument. This SEM is located in building 346 room 904 (basement). The meeting point will be at the stairs to the basement in building the 346 or by the SEM.
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| Prerequisites
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All participants
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| Preparations
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All participants
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Before the lecture:
- All participants should know in which building they are going to use SEM. If you are in doubt, please fill out this SEM access request form:
https://www.nanolab.dtu.dk/use-nanolab/use-of-our-facilities
- Read the "Scanning Electron Microscopy Primer" by Bob Hafner and some notes that lists the differences between the SEMs described in the primer and the SEMs at DTU Nanolab (mainly the SEMs in building 346).
You can find the preparation material here: U:\Nlab\CleanroomDrive\SEM TPT, or online: SEM Primer (included with permission from the author)
. All participants will also get an email with the preparation material a couple of days before the lecture.
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SEM users in building 314 and 375
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- The resposible persons will tell you, what you have to prepare. This depends on what SEM(s) you will have to use.
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SEM users in building 346
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Before the first group training session:
Before the individual training session(s):
- Read the user manual for SEM Supra 1. This can be found in LabManager here
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| Course responsible
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All participants
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- General questions to the SEM TPT course can be send to SEM@nanolab.dtu.dk
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SEM users in building 314 and 375
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- Berit Wenzell (bewe@dtu.dk)
- Marie Karen Tracy Hong Lin (mktracy@dtu.dk) - Softmatter and life science samples
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SEM users in building 346
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- The SEM responsible persons in building 346. Contact email: SEM@nanolab.dtu.dk
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| Learning objectives
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All participants
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- Explain SEM electron optics and detectors
- Understand possibilities and limitations
- Optimize SEM images
- Know where to go after the lecture – which tool and where
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| Lecture slides
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All participants
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The slides from the presentation can be found on LabManager as three separate files (requires login):
- Slides 1-31 with introduction and theory
- Slides 32-49 about image optimization (continued), EDX, and some info on practical SEM operation
- Slides 50-106 about practical SEM operation, tips and troubleshooting.
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