Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM

From LabAdviser



The DREM 0.5kW v2.3 recipe is in the standard recipe folder.

DREM 0.5 kW recipes
Recipe General Pressure Gases Generators Matching Tem- pera- ture Results
C4F8 SF6 Ar Coil Platen Coil Platen
Platen Stb S/E Dp Et Cyc Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Runs Keywords
U/D H/L D B M D B M D B M D B M D B M D B M D B M L T L T L T L T
DREM 0.5kW v2.3 Clamp Substrate,Pump to base, home platen matching unit, barc1, stab 10+
U HF D/E 3 2.5 100% 100% 0.3@5 0.5@10 45 0.3@25 5 0.3@20 0.5@10 10 1.9@20 0.5@30 30 75 1.5@75,75 0.5 0.5 1 0.9@1 1@40 1 45 50 45 50 41 60 41 60 0

10+




DREM 0.2kW

DREM 0.2 kW v2
Recipe General Pressure Gases Generators Matching Tem- pera- ture Results
C4F8 SF6 Ar Coil Platen Coil Platen
Platen Stb S/E Dp Et Cyc Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Runs Keywords
U/D H/L D B M D B M D B M D B M D B M D B M D B M L T L T L T L T
DREM 0.2kW Clamp Substrate,Pump to base, home platen matching unit, barc1, stab 9
U HF D/E 2.8 2.6 100% 100% 0.3@5 0.5@15 25 0.3@25 5 0.3@15 0.5@10 10 1.9@10 0.5@20 20 60 60 0.25 0.25 1 0.9@1 1@20 1 40 50 40 50 38.2 53.8 38.2 53.8 0