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Specific Process Knowledge/Characterization/XPS/ISS/Notes

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< Specific Process Knowledge‎ | Characterization‎ | XPS‎ | ISS

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Notes on ISS

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Calibration by Nanolab staff only

Open the ion gun dialog and select the 'Filament' tab as shown below. In the 'Auto Setup' frame select 'ISS mode' and press 'Run' as indicated by a green square below left. When this procedure completes, press 'Calculate' in the 'Ion Source Energy' frame - highlighted by a red square.

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