Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching

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Below are images illustrating works that have been done during the ph.d. projects.

• 1. 3D silicon photonic crystal membranes.
  1. 3D silicon photonic crystal membranes.
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  2. Comparison of scallops by traditional Bosch process and modified DREM process.
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  3. 3D silicon microstructures fabricated by DREM process.
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  4. 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation.
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  5. 3D silicon stacked nanowires for structural color generation.
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  6. High aspect ratio silicon micropillars fabricated with DREM process.
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  7. ZIF-8 crystals for tunable structural colors.
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  8. Using OES to monitor the fluorocarbon film deposition with Pegasus 1.