Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange

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Comparison of continuous processes

Process Before (Old showerhead) After (New showerhead)
Name/Type Description/parameters Wafer ID Comment SEM images Wafer ID Comment SEM images
Continuous black silicon recipe on blank wafer 15 mins, -10 degrees, 32 mtorr, 60 sccm SF6, 55 sccm O2, 70 W platen S004592 Wafer centre S004679 Wafer centre
S003900 Wafer edge S004679 Wafer edge
Continuous isotropic silicon etch called isoslow7 1 minute, 10 degrees, 10 mTorr, 80 SF6, 150 W coil, 3 W platen S003900 4" wafer, 50 % load

S00XXX No test yet File:S00XX centre.jpg

Comparison of switched processes

Process A

Recipe Name Temp. Deposition step Etch step Comments
Time Pres. C4F8 SF6 O2 Coil Time Pres. C4F8 SF6 O2 Coil Platen Showerhead Runs Key words
Process A Step1 11 cyc 20 4 25 200 0 0 2000 7.0 25(1.5s) 90>>150 0 350(1.5s) 550 5 2800 120>>140(1.5s) 45 Old 1
Step2 44 cyc 4 25 200 0 0 2000 7.0 25(1.5s) 150 0 350(1.5s) 550 5 2800 140(1.5s) 45
Step1 11 cyc 20 4 25 200 0 0 2000 7.0 25(1.5s) 90>>150 0 350(1.5s) 550 5 2800 120>>140(1.5s) 45 New 1 Profile improved
Step2 44 cyc 4 25 200 0 0 2000 7.0 25(1.5s) 150 0 350(1.5s) 550 5 2800 140(1.5s) 45

SOI

Recipe Name Temp. Deposition step Etch step Comments
Time Pres. C4F8 SF6 O2 Coil Time Pres. C4F8 SF6 O2 Coil Platen Showerhead Runs Key words
SOI etch SOI 20 2 25 250 0 0 2000 3 30 0 400 40 2800 75 (0.025s, 75%) Old 1
SOI 20 2 25 250 0 0 2000 3 30 0 400 40 2800 75 (0.025s, 75%) New 1 OK

Process D

Recipe Name Temp. Deposition step Etch step Comments
Time Pres. C4F8 SF6 O2 Coil Time Pres. C4F8 SF6 O2 Coil Platen Showerhead Runs Key words
Process D Original 0 2 20 150 0 0 2000 2.4 26 0 275 5 2500 35 Old 1
Original 0 2 20 150 0 0 2000 2.4 26 0 275 5 2500 35 New 1
New Process D 0 1 20 150 0 0 2000 3 26 0 275 5 2500 35 New 2 Large undercut
PrD01 0 1 20 150 0 0 2000 2.4 26 0 275 5 2500 35 New 2
PrD02 0 1.1 20 150 0 0 2000 2.4 26 0 275 5 2500 35 New 2
PrD-3 0 1 20 150 0 0 2000 2.5 26 0 275 5 2500 35 New 2
PrD-4 0 1 20 150 0 0 2000 2.2 26 0 275 5 2500 35 New 2

Polysilicon etch

Recipe description Name Temp. Deposition step Etch step Comments
Time Pres. C4F8 SF6 O2 Coil Time Pres. C4F8 SF6 O2 Coil Platen Showerhead Runs Key words
Polysilicon etch polySi etch DUV mask 30 2.3 10 50 0 0 600 5.0 10 20 60 5 400 40 Old 1 Slightly over-etching to ensure complete absence of grass
polySi etch DUV mask 30 2.3 10 50 0 0 600 5.0 10 20 60 5 400 40 New 1
Cpoly1 30 1.2 10 50 0 0 600 5.0 10 20 60 5 400 40 New 1 Very aggressive, unusable
Cpoly2 30 1.4 10 50 0 0 600 5.0 10 20 60 5 400 40 New 1
Cpoly3 30 1.6 10 50 0 0 600 5.0 10 20 60 5 400 40 New 1
Cpoly4 30 1.8 10 50 0 0 600 5.0 10 20 60 5 400 40 New 1
Cpoly5 30 2.0 10 50 0 0 600 5.0 10 20 60 5 400 40 New 1
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