Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces
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Roughness measurements High aspect ratio samples Steep steps - but no high aspect ratio Topographic measurement with no or very small steps (<?)
Comparison method 1 and method 2 for the process
| Roughness measurements | Topographic measurements with no steep steps | Steep steps but no high aspect ratio | High aspect ratio measurements | |
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| Generel description | Generel description - Roughness measurements | Generel description - | ||
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| Recommended experiment/Workspace |
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