Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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==Test of Phosphorus Predep furnace==
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====Purpose====
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To study the coherence between the temperature and time for doping with phosphorus in DTU-Danchip Phosphorus Predep furnace (A4).
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====Study setup====
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Revision as of 11:12, 25 February 2013

The furnace A4 phosphorus predep(N-predep) can be used to predeposit silicon wafers with phosphor. The silicon wafers are positioned in a quarts boat. Phosphor is predeposited in the silicon wafers.

In preparation

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Test of Phosphorus Predep furnace

Purpose

To study the coherence between the temperature and time for doping with phosphorus in DTU-Danchip Phosphorus Predep furnace (A4).

Study setup

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