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'''The Bosch process'''
'''The Bosch process'''
The DRIE Pegasus is a state-of-art silicon dry etcher that offers outstanding performance in terms of etch rate, uniformity etc. It uses the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|here]] for more fundamental information of the system.
The DRIE Pegasus is a state-of-art silicon dry etcher that offers outstanding performance in terms of etch rate, uniformity etc. It uses the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|here]] for more fundamental information of the system.


'''User manuals etc.'''
'''User manuals etc.'''
The user manual, quality control procedure and the results may all be found on the [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=265| DRIE-Pegasus LabManager] page.
The user manual, quality control procedure and the results may all be found on the [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=265| DRIE-Pegasus LabManager] page.


'''Important information'''
'''Important information'''
In August 2011 we introduced a new set of rules regarding the loading of wafers. In you were trained prior to this, you can find more information  
In August 2011 we introduced a new set of rules regarding the loading of wafers. In you were trained prior to this, you can find more information  
[[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Waferloading|here]].
[[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Waferloading|here]].


'''Acceptance test'''
'''Acceptance test'''
The instrument was opened for users in April 2010 when the acceptance test was signed. This was based on the performance of five standard recipes (A, B, C, D and SOI) that are further examined below. The acceptance test report is found [[Media:Pegasus_AcceptanceTest.pdf|here]].
The instrument was opened for users in April 2010 when the acceptance test was signed. This was based on the performance of five standard recipes (A, B, C, D and SOI) that are further examined below. The acceptance test report is found [[Media:Pegasus_AcceptanceTest.pdf|here]].


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