Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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==The Bosch process in the DRIE-Pegasus== | ==The Bosch process in the DRIE-Pegasus== | ||
This section introduces the advanced Bosch process used at the Pegasus and the process options it offers. | |||
[[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description]] | [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description]] | ||