Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions

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 |style="background:WhiteSmoke; color:black"|Oxidation:
 *Dry
-*Wet: with torch (H<math>_2</math>+O<math>_2</math>)
+*Wet: with torch (H<sub>2</sub>+O<sub>2</sub>)
 |-
 !style="background:silver; color:black" align="left"|Performance
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 |style="background:LightGrey; color:black"|Gasses on the system
 |style="background:WhiteSmoke; color:black"|
-*O<math>_2</math>, N<math>_2</math> and H<math>_2</math>
+*O<sub>2</sub>, N<sub>2</sub> and H<sub>2</sub>
 |-
 !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates