Specific Process Knowledge/Characterization/XPS: Difference between revisions
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==XPS technique== | ==XPS technique== | ||
[[image:Si_spectra_Labadvisor. | [[image:Si_spectra_Labadvisor.jpg|275x275px|right|thumb|XPS Si2p spectrum of Si sample]] | ||
XPS is a surface sensitive and non destructive technique used for elemental composition analysis. | XPS is a surface sensitive and non destructive technique used for elemental composition analysis. | ||