Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

@@ Line 67: / Line 67: @@
 | Cleavage lines
 |-
-! Process A
-| Bosch
-| width="120" | Fast etch
-! width="120" | Feature
-! width="120" | Mask material
-! width="120" | Etch load
-! width="120" | sice
-| Cleavage lines
-|-
 |}