Specific Process Knowledge/Lithography/UVExposure/aligner MA6-2: Difference between revisions
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==Quality Control (QC)== | ==Quality Control (QC)== | ||
The purpose of the QC process is to check the intensity and uniformity of the exposure light in the Aligner: MA6-2, using a UV optometer. The optometer is placed at 5 fixed positions, in the exposure area on a dedicated QC chuck, and the intensity of the light is measured. | |||
The 5 intensity measurements are then used to calculate the average intensity as well as the peak uniformity error: <math>PUE[%] = \frac{min-max}{min+max} \sdot 100</math>. | |||
'''Intensity accept limit:'''<br> | |||
The intensity should be corrected if the average intensity (from the 5 measurement points) deviates more than ±5% from nominal value. The nominal value for the Aligner: MA6-2 is 11 mW/cm2, which means that the accept range is 10.45 - 11.55 mW/cm2 | |||
'''Uniformity accept limit:'''<br> | |||
The uniformity should be adjusted if the uniformity error is greater than 2%. | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2] - '''requires login'''<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=339 The newest QC data for Aligner: MA6-2] - '''requires login''' | |||
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Power supply and/or lamp will be adjusted if intensity is outside the limit. | Power supply and/or lamp will be adjusted if intensity is outside the limit. | ||
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