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Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,792 edits
Line 658: Line 658:
|Aligner: Maskless 01 (MLA1)
|Aligner: Maskless 01 (MLA1)
220mJ/cm<sup>2</sup>, Defoc -4
220mJ/cm<sup>2</sup>, Defoc -4
|[[Image:w04_mla1_nLOF_D220_F-4_X_l_2um.jpg|280px]]
|[[Image:w04_mla1_nLOF_D220_F-4_X_l_2um.jpg|340px]]
|[[Image:w04_mla1_nLOF_D220_F-4_X_t_2um.jpg|280px]]
|[[Image:w04_mla1_nLOF_D220_F-4_X_t_2um.jpg|340px]]
|[[Image:w04_mla1_nLOF_D220_F-4_Xlines.jpg|280px]]
|[[Image:w04_mla1_nLOF_D220_F-4_Xlines.jpg|340px]]
|[[Image:w04_mla1_nLOF_D220_F-4_Xtrench.jpg|280px]]
|[[Image:w04_mla1_nLOF_D220_F-4_Xtrench.jpg|340px]]


|}
|}
Line 704: Line 704:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|2µm triplets
|[[Image:w05_ma6_nLOF_D100_vac_2um.jpg|280px]]
|[[Image:w05_ma6_nLOF_D100_vac_2um.jpg|340px]]
|[[Image:w05_ma6_nLOF_D120_vac_2um.jpg|280px]]
|[[Image:w05_ma6_nLOF_D120_vac_2um.jpg|340px]]
|[[Image:w05_ma6_nLOF_D140_vac_2um.jpg|280px]]
|[[Image:w05_ma6_nLOF_D140_vac_2um.jpg|340px]]
|[[Image:w05_ma6_nLOF_D160_vac_2um.jpg|280px]]
|[[Image:w05_ma6_nLOF_D160_vac_2um.jpg|340px]]


|}
|}
Line 728: Line 728:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|2µm triplets
|[[Image:w04_mla1_nLOF_D200_F-4_2um.jpg|280px]]
|[[Image:w04_mla1_nLOF_D200_F-4_2um.jpg|340px]]
|[[Image:w04_mla1_nLOF_D220_F-4_2um.jpg|280px]]
|[[Image:w04_mla1_nLOF_D220_F-4_2um.jpg|340px]]
|[[Image:w04_mla1_nLOF_D240_F-4_2um.jpg|280px]]
|[[Image:w04_mla1_nLOF_D240_F-4_2um.jpg|340px]]


|}
|}
Line 751: Line 751:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|2µm triplets
|[[Image:W17 mla2 nLOF D400 F0_01.jpg|280px]]
|[[Image:W17 mla2 nLOF D400 F0_01.jpg|340px]]
|[[Image:W17 mla2 nLOF D450 F0_04.jpg|280px]]
|[[Image:W17 mla2 nLOF D450 F0_04.jpg|340px]]
|[[Image:W17 mla2 nLOF D500 F0_01.jpg|280px]]
|[[Image:W17 mla2 nLOF D500 F0_01.jpg|340px]]


|}
|}
Line 828: Line 828:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|2µm triplets
|[[Image:W17 mla2 nLOF D450 F0_04.jpg|280px]]
|[[Image:W17 mla2 nLOF D450 F0_04.jpg|340px]]
|[[Image:W17 mla2 nLOF D450 F2_01.jpg|280px]]
|[[Image:W17 mla2 nLOF D450 F2_01.jpg|340px]]
|[[Image:W17 mla2 nLOF D450 F4_02.jpg|280px]]
|[[Image:W17 mla2 nLOF D450 F4_02.jpg|340px]]


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Lines
|Lines
|[[Image:W17 mla2 nLOF D450 F0_03.jpg|280px]]
|[[Image:W17 mla2 nLOF D450 F0_03.jpg|340px]]
|[[Image:W17 mla2 nLOF D450 F2_02.jpg|280px]]
|[[Image:W17 mla2 nLOF D450 F2_02.jpg|340px]]
|[[Image:W17 mla2 nLOF D450 F4_03.jpg|280px]]
|[[Image:W17 mla2 nLOF D450 F4_03.jpg|340px]]


|}
|}
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