Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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====Linewidth and sidewall angle vs exposure dose==== | ====Linewidth and sidewall angle vs exposure dose==== | ||
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'''SEM images as a function of exposure dose for Aligner: MA6-2 using vacuum contact:''' | '''SEM images as a function of exposure dose for Aligner: MA6-2 using vacuum contact:''' | ||