Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
Appearance
| Line 368: | Line 368: | ||
|Aligner: Maskless 01 (MLA1) | |Aligner: Maskless 01 (MLA1) | ||
|220 | |220 | ||
|-4 | | -4 | ||
|2µm | |2µm | ||
| | | | ||
| Line 368: | Line 368: | ||
|Aligner: Maskless 01 (MLA1) | |Aligner: Maskless 01 (MLA1) | ||
|220 | |220 | ||
|-4 | | -4 | ||
|2µm | |2µm | ||
| | | | ||