Specific Process Knowledge/Lithography/Development/manualTMAH developer: Difference between revisions
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==Agitation== | ===Agitation=== | ||
Testing showed that adding agitation to the puddle step gave better uniformity in the development rate over the entire area of the substrate as well as increased development rate. | Testing showed that adding agitation to the puddle step gave better uniformity in the development rate over the entire area of the substrate as well as increased development rate. | ||