Specific Process Knowledge/Lithography/Development/manualTMAH developer: Difference between revisions
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=Developer: TMAH Manual 02= | |||
[[file:Developer_TMAH_manual_02.jpg|400px|right|thumb|Developer: TMAH Manual 02 is located in E-4.]] | [[file:Developer_TMAH_manual_02.jpg|400px|right|thumb|Developer: TMAH Manual 02 is located in E-4.]] | ||
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The user manual, user APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=324 LabManager] - '''requires login''' | The user manual, user APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=324 LabManager] - '''requires login''' | ||
=Process information= | |||
All recipes use the following structure: | All recipes use the following structure: | ||
#Pressurize the TMAH canister | #Pressurize the TMAH canister | ||
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*5x060s | *5x060s | ||
=Equipment performance and process related parameters= | |||
{| class="wikitable" | {| class="wikitable" | ||