Specific Process Knowledge/Lithography/Development: Difference between revisions
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*Vacuum-free edge-grip chucks for 50 mm, 100 mm & 150 mm, and 200 mm substrates | *Vacuum-free edge-grip chucks for 50 mm, 100 mm & 150 mm, and 200 mm substrates | ||
*Chip chuck for chips & | *Chip chuck for chips & 50 mm substrates | ||
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*Vacuum-free edge-grip | *Vacuum-free edge-grip chuck for 100 mm & 150 mm substrates | ||
*Chip chuck for chips & | *Chip chuck for chips & 50 mm substrates | ||
| Vacuum chuck | | Vacuum chuck | ||
| Vacuum chuck | | Vacuum chuck | ||
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* 200 mm wafers | * 200 mm wafers | ||
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* Chips (5mm to | * Chips (5mm to 50 mm) | ||
* 100 mm wafers | * 100 mm wafers | ||
* 150 mm wafers | * 150 mm wafers | ||