Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 222: | Line 222: | ||
| 0.999960 | | 0.999960 | ||
| -0.31 | | -0.31 | ||
| ±1.30 | | <span style="color:red">±1.30</span> | ||
|- | |- | ||
| Line 259: | Line 259: | ||
|'''Y''' | |'''Y''' | ||
| - | | - | ||
| -2,69 | | <span style="color:red">-2,69</span> | ||
| ±0,2 | | ±0,2 | ||
| Line 278: | Line 278: | ||
|'''Y''' | |'''Y''' | ||
| - | | - | ||
| -2,16 | | <span style="color:red">-2,16</span> | ||
| ±0,15 | | ±0,15 | ||
| Line 336: | Line 336: | ||
| 0.999963 | | 0.999963 | ||
| -1.11 | | -1.11 | ||
| ±1.175 | | <span style="color:red">±1.175</span> | ||
|} | |} | ||
| Line 380: | Line 380: | ||
| 0.999979 | | 0.999979 | ||
| -1.06 | | -1.06 | ||
| ±1,375 | | <span style="color:red">±1,375</span> | ||
|- | |- | ||
| Line 392: | Line 392: | ||
|rowspan="2" align="center"| - | |rowspan="2" align="center"| - | ||
| -0.94 | | -0.94 | ||
| ±7,375 | | <span style="color:red">±7,375</span> | ||
|- | |- | ||
| Line 418: | Line 418: | ||
| 0.999979 | | 0.999979 | ||
| -0.94 | | -0.94 | ||
| ±1.5 | | <span style="color:red">±1.5</span> | ||
|- | |- | ||