Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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| Line 193: | Line 193: | ||
(like QC) | (like QC) | ||
|'''X''' | |'''X''' | ||
|rowspan="2" align="center"|1: -37500; 0<br>2: 37500; 0<br>3: 0; | |rowspan="2" align="center"|1: -37500; 0<br>2: 37500; 0<br>3: 0; 35000<br>4: 0; -35000 | ||
|rowspan="2" align="center"|0.000 | |rowspan="2" align="center"|0.000 | ||
| 1.000001 | | 1.000001 | ||