Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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[[Category: Equipment |Etch DRIE]] | [[Category: Equipment |Etch DRIE]] | ||
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= Process optimization using the Picoscope = | = Process optimization using the Picoscope = | ||
Before going into details on why it makes sense to optimize the processes using the picoscope process monitoring, we need to have a look at how monitoring processes is usually done. | Before going into details on why it makes sense to optimize the processes using the picoscope process monitoring, we need to have a look at how monitoring processes is usually done. | ||