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Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions

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[[/Ion source in E-beam evaporator (Temescal)|Information on the ion source]].
[[/Ion source in E-beam evaporator (Temescal)|Information on the ion source]].


==Equipment performance and process related parameters for the Temescal E-beam evaporator==
==Equipment performance and process related parameters==


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