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Specific Process Knowledge/Thin film deposition/Deposition of Titanium Oxide: Difference between revisions

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!Generel description
!Generel description
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*Evaporation of Ti or TiO<sub>2</sub> pellets in the presence of a O<sub>2</sub> flow.  
*Evaporation of Ti or Ti<sub>2</sub>O<sub>3</sub> pellets in the presence of O<sub>2</sub>.  
*Can heat up to 250 °C
*Can heat up to 250 °C.
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*Reactive DC sputtering of Ti target  
*Reactive DC sputtering of Ti target  
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