Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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=== How to read the SPTS notation on process recipes === | === How to read the SPTS notation on process recipes === | ||
Two words about the SPTS short notation on process recipes: When, take for instance the etch cycle from step 1 in Process A below, it is written Platen power 120 >> 140 (1.5s) 45 it is to be interpreted as: | Two words about the SPTS short hand notation on process recipes: When, take for instance the etch cycle from step 1 in Process A below, it is written Platen power 120 >> 140 (1.5s) 45 it is to be interpreted as: | ||
# In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | # In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ||
# During the reminder of the cycle the platen power is kept constant at 45 W. | # During the reminder of the cycle the platen power is kept constant at 45 W. | ||
=== Process A === | === Process A === | ||