Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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* The user manual provided by SPTS can be found here [[Media:SPTS Pegasus user manual.pdf|>HERE<]] | * The user manual provided by SPTS can be found here [[Media:SPTS Pegasus user manual.pdf|>HERE<]] | ||
== Hardware information == | |||
[[Media:Pegasus_sheet_V8.pdf |Hardware Information - Overview]]. | [[Media:Pegasus_sheet_V8.pdf |Hardware Information - Overview]]. | ||