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Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions

Reet (talk | contribs)
Reet (talk | contribs)
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*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the Temescal]<br>
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the E-beam Evaporator (Temescal)]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the Temescal]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the E-beam Evaporator (Temescal)]<br>
 
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=511 QC procedure for the E-beam Evaporator (10-pockets)]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=511 The newest QC data for the E-beam Evaporator (10-pockets)]<br>


{| {{table}}
{| {{table}}
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{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px"
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px"
!QC limits
!QC limits
!Temescal
!Both e-beam evaporators
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|Deposition rate deviation
|Deposition rate deviation