Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
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*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the Temescal]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the E-beam Evaporator (Temescal)]<br> | ||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the Temescal]<br> | *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the E-beam Evaporator (Temescal)]<br> | ||
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=511 QC procedure for the E-beam Evaporator (10-pockets)]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=511 The newest QC data for the E-beam Evaporator (10-pockets)]<br> | |||
{| {{table}} | {| {{table}} | ||
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{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px" | {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px" | ||
!QC limits | !QC limits | ||
! | !Both e-beam evaporators | ||
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|Deposition rate deviation | |Deposition rate deviation | ||