Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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==Comparison of Al deposition options== | ==Comparison of Al deposition options== | ||
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Almost any that does not degas. See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=404 cross-contamination sheet]. | Almost any that does not degas. See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=404 cross-contamination sheet]. | ||
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