Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

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	=== Where have these numbers been used? ===		=== Where have these numbers been used? ===

	* [~~http://labadviser.danchip.dtu.dk/index.php/~~Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA~~#Results:_Etched_depths_in_trenches_of_different_widths\| Investigation of Process A performance on Pegasus 1~~]		* [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA]]